Introduction

Book chapter, 2016

Microfabrication and field-effect transistors are two key enabling technologies for today’s information society. It is hard to imagine superfast and omnipresent electronic devices, information technology, the Internet, and mobile communication technologies without the access to continuously cheaper and miniaturized microprocessors. The giant leap in performance of microprocessors from the first personal computing machines to today’s mobile devices is to a large extent realized via development of new materials and fabrication methods leading to miniaturization of the active components.