A Resonant Graphene NEMS Vibrometer
Journal article, 2022
Measuring vibrations is essential to ensuring building structural safety and machine stability. Predictive maintenance is a central internet of things (IoT) application within the new industrial revolution, where sustainability and performance increase over time are going to be paramount. To reduce the footprint and cost of vibration sensors while improving their performance, new sensor concepts are needed. Here, double-layer graphene membranes are utilized with a suspended silicon proof demonstrating their operation as resonant vibration sensors that show outstanding performance for a given footprint and proof mass. The unveiled sensing effect is based on resonant transduction and has important implications for experimental studies involving thin nano and micro mechanical resonators that are excited by an external shaker.
nano-electromechanical (NEMS)
resonators
graphene
vibration
laser doppler vibrometry
Author
Daniel Moreno-Garcia
Swiss Federal Institute of Technology in Lausanne (EPFL)
Xuge Fan
Royal Institute of Technology (KTH)
Beijing Institute of Technology
Anderson David Smith
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems
M.C. Lemme
RWTH Aachen University
Vincenzo Messina
Swiss Federal Institute of Technology in Lausanne (EPFL)
Cristina Martin-Olmos
Swiss Integrative Center for Human Health
Frank Niklaus
Royal Institute of Technology (KTH)
Luis Guillermo Villanueva
Swiss Federal Institute of Technology in Lausanne (EPFL)
Small
1613-6810 (ISSN) 1613-6829 (eISSN)
Vol. 18 28 2201816Graphene Core Project 3 (Graphene Flagship)
European Commission (EC) (EC/H2020/881603), 2020-04-01 -- 2023-03-31.
Subject Categories
Other Engineering and Technologies not elsewhere specified
Other Chemical Engineering
Other Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1002/smll.202201816
PubMed
35638191