A Resonant Graphene NEMS Vibrometer
Artikel i vetenskaplig tidskrift, 2022
Measuring vibrations is essential to ensuring building structural safety and machine stability. Predictive maintenance is a central internet of things (IoT) application within the new industrial revolution, where sustainability and performance increase over time are going to be paramount. To reduce the footprint and cost of vibration sensors while improving their performance, new sensor concepts are needed. Here, double-layer graphene membranes are utilized with a suspended silicon proof demonstrating their operation as resonant vibration sensors that show outstanding performance for a given footprint and proof mass. The unveiled sensing effect is based on resonant transduction and has important implications for experimental studies involving thin nano and micro mechanical resonators that are excited by an external shaker.
nano-electromechanical (NEMS)
resonators
graphene
vibration
laser doppler vibrometry
Författare
Daniel Moreno-Garcia
Ecole Polytechnique Federale de Lausanne (EPFL)
Xuge Fan
Kungliga Tekniska Högskolan (KTH)
Beijing Institute of Technology
Anderson David Smith
Chalmers, Mikroteknologi och nanovetenskap, Elektronikmaterial
M.C. Lemme
RWTH Aachen University
Vincenzo Messina
Ecole Polytechnique Federale de Lausanne (EPFL)
Cristina Martin-Olmos
Swiss Integrative Center for Human Health
Frank Niklaus
Kungliga Tekniska Högskolan (KTH)
Luis Guillermo Villanueva
Ecole Polytechnique Federale de Lausanne (EPFL)
Small
1613-6810 (ISSN) 1613-6829 (eISSN)
Vol. 18 28 2201816Graphene Core Project 3 (Graphene Flagship)
Europeiska kommissionen (EU) (EC/H2020/881603), 2020-04-01 -- 2023-03-31.
Ämneskategorier
Övrig annan teknik
Annan kemiteknik
Annan elektroteknik och elektronik
DOI
10.1002/smll.202201816
PubMed
35638191