Thin-film UVB LEDs enabled by electrochemical etching of AlGaN
Other conference contribution, 2018
uvb
led
electrochemical etching
Author
Michael Alexander Bergmann
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Johannes Enslin
Technische Universität Berlin
Filip Hjort
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Tim Wernicke
Technische Universität Berlin
Michael Kneissl
Technische Universität Berlin
Åsa Haglund
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Kanasawa, Japan,
Areas of Advance
Nanoscience and Nanotechnology
Materials Science
Subject Categories
Physical Sciences
Other Materials Engineering
Nano Technology
Infrastructure
Chalmers Materials Analysis Laboratory
Nanofabrication Laboratory