Free-standing open space microfluidic devices by dry resist lamination
Journal article, 2025
We present a cleanroom-compatible fabrication route to open space microfluidic devices, utilizing a multilayer lamination/photolithography process on the wafer scale. The devices were applied to generate and maintain molecular surfactant films. In a dedicated setup, film stability was investigated in conjunction with 108 kHz ultrasonic sound, and response to acoustic waves in the audible range was determined.
Lamination
Open space
Thin surfactant films
Surface active agents
Film preparation
Dry film photoresist
Microfluidics
Author
Rui Liu
Chemistry and Biochemistry Phd Students and Postdocs
Esteban Pedrueza Villalmanzo
Chalmers, Microtechnology and Nanoscience (MC2), Nanofabrication Laboratory
Farah Fatima
Chalmers, Chemistry and Chemical Engineering, Chemistry and Biochemistry
Aldo Jesorka
Chalmers, Chemistry and Chemical Engineering
Microfluidics and Nanofluidics
1613-4982 (ISSN) 1613-4990 (eISSN)
Vol. 29 7 47Pickering emulsions for food applications (PICKFOOD)
European Commission (EC) (EC/H2020/956248), 2022-01-01 -- 2024-12-31.
Proto-Opto-Electro-Mechanical Hybrid Systems for Generation-Next Bionic Devices (PROGENY)
European Commission (EC) (EC/H2020/899205), 2021-01-01 -- 2024-06-30.
Subject Categories (SSIF 2025)
Other Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1007/s10404-025-02818-3