Free-standing open space microfluidic devices by dry resist lamination
Journal article, 2025
We present a cleanroom-compatible fabrication route to open space microfluidic devices, utilizing a multilayer lamination/photolithography process on the wafer scale. The devices were applied to generate and maintain molecular surfactant films. In a dedicated setup, film stability was investigated in conjunction with 108 kHz ultrasonic sound, and response to acoustic waves in the audible range was determined.
Open space
Film preparation
Microfluidics
Thin surfactant films
Lamination
Surface active agents
Dry film photoresist
Author
Rui Liu
Chemistry and Biochemistry Phd Students and Postdocs
Esteban Pedrueza Villalmanzo
Chalmers, Chemistry and Chemical Engineering, Chemistry and Biochemistry
Farah Fatima
Chalmers, Chemistry and Chemical Engineering, Chemistry and Biochemistry
Aldo Jesorka
Chalmers, Chemistry and Chemical Engineering
Microfluidics and Nanofluidics
1613-4982 (ISSN) 1613-4990 (eISSN)
Vol. 29 7 47Proto-Opto-Electro-Mechanical Hybrid Systems for Generation-Next Bionic Devices (PROGENY)
European Commission (EC) (EC/H2020/899205), 2021-01-01 -- 2024-06-30.
Pickering emulsions for food applications (PICKFOOD)
European Commission (EC) (EC/H2020/956248), 2022-01-01 -- 2024-12-31.
Subject Categories (SSIF 2025)
Other Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1007/s10404-025-02818-3