Free-standing open space microfluidic devices by dry resist lamination
Artikel i vetenskaplig tidskrift, 2025
We present a cleanroom-compatible fabrication route to open space microfluidic devices, utilizing a multilayer lamination/photolithography process on the wafer scale. The devices were applied to generate and maintain molecular surfactant films. In a dedicated setup, film stability was investigated in conjunction with 108 kHz ultrasonic sound, and response to acoustic waves in the audible range was determined.
Open space
Film preparation
Microfluidics
Thin surfactant films
Lamination
Surface active agents
Dry film photoresist
Författare
Rui Liu
Kemi och biokemi doktorander och postdocs
Esteban Pedrueza Villalmanzo
Chalmers, Kemi och kemiteknik, Kemi och biokemi
Farah Fatima
Chalmers, Kemi och kemiteknik, Kemi och biokemi
Aldo Jesorka
Chalmers, Kemi och kemiteknik
Microfluidics and Nanofluidics
1613-4982 (ISSN) 1613-4990 (eISSN)
Vol. 29 7 47Proto-Opto-Electro-Mechanical Hybrid Systems for Generation-Next Bionic Devices (PROGENY)
Europeiska kommissionen (EU) (EC/H2020/899205), 2021-01-01 -- 2024-06-30.
Pickering emulsions for food applications (PICKFOOD)
Europeiska kommissionen (EU) (EC/H2020/956248), 2022-01-01 -- 2024-12-31.
Ämneskategorier (SSIF 2025)
Annan elektroteknik och elektronik
DOI
10.1007/s10404-025-02818-3