Broadband Microfabricated Waveguide Terminations for Low-power Applications at Terahertz Frequencies

Paper in proceeding, 2024

We present the design of broadband microfabricated waveguide terminations, for prospective use as drop-in components in waveguide blocks. Two types of terminations were designed and characterized using frequency extension modules. The first type of termination is based on quartz substrate, employing an E-probe to couple to a waveguide and on-substrate Ti-N alloy resistive absorber integrated with broadband tuning circuitry, exhibiting a return loss better than 20 dB over the 260-370 GHz frequency range. The second type of load features a finline to slot-line transition made of a 30 µm thick Si membrane covered with high resistivity Ti-N alloy. This termination exhibits a measured return loss better than 20 dB at all frequencies in the 200-380 GHz band.