Microfabricated metal and oxide fibers for biological applications
Journal article, 1995
Particulates and fibers of ≤10 μ;m dimensions are important in many human-environment interactions. Two examples are asbestos fibers in the lung and particulate generation from orthopaedic implants. In this article, methods of producing fibers made from evaporated metal and oxide films using microfabrication techniques are described. Two different “lift-off” techniques are discussed in detail. Processing of the fibers allows unprecedented flexibility both in the choice of fiber material as well as control over fiber shape and dimensions. Monodispersed size distributions are obtainable. Fibers of silica, titanium, and gold have been produced and placed into suspensions ready for biological experiments.
Particle size analysis
Chemical analysis
Metallic films
Medical applications
Titanium
Silica
Surfaces
Fibers
Oxides
Gold
Auger electron spectroscopy
Author
Julie Gold
Chalmers, Applied Physics
Journal of Vacuum Science and Technology A
0734-2101 (ISSN) 15208559 (eISSN)
Vol. 13 5 2638-2643Subject Categories (SSIF 2025)
Chemical Sciences
Materials Engineering
Physical Sciences
DOI
10.1116/1.579463