Laser-surface nanostructures in carbon coating
Journal article, 2005

In this paper we propose a theoretical basis of a new method of laser ablation lithography (LAL) using coherent laser beams interference patterns. The advantage of our method is the absence of the need to use a mask. In our method the profile of nanostructures surface in carbon coating is produced by an interference laser beam pattern and depends on the following parameters: angle of beams convergence, phase difference, and intensity of the beams, and so forth


O. Y. Semchuk

R. V. Bila

Magnus Willander

University of Gothenburg

Magnus Karlsteen

University of Gothenburg

Fullerenes Nanotubes and Carbon Nanostructures

1536-383X (ISSN) 1536-4046 (eISSN)

Vol. 13 331-337

Subject Categories

Physical Sciences

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