Laser-surface nanostructures in carbon coating
Artikel i vetenskaplig tidskrift, 2005

In this paper we propose a theoretical basis of a new method of laser ablation lithography (LAL) using coherent laser beams interference patterns. The advantage of our method is the absence of the need to use a mask. In our method the profile of nanostructures surface in carbon coating is produced by an interference laser beam pattern and depends on the following parameters: angle of beams convergence, phase difference, and intensity of the beams, and so forth

Författare

O. Y. Semchuk

R. V. Bila

Magnus Willander

Göteborgs universitet

Magnus Karlsteen

Göteborgs universitet

Fullerenes Nanotubes and Carbon Nanostructures

1536-383X (ISSN) 1536-4046 (eISSN)

Vol. 13 331-337

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Fysik