Performance of Coplanar Waveguides on Surface Passivated Highly Resistive Silicon Covered by Ferroelectric Thin Film
Paper in proceeding, 2007
Author
Dan Kuylenstierna
Chalmers, Microtechnology and Nanoscience (MC2)
Martin Norling
Chalmers, Applied Physics, Physical Electronics
Andrei Vorobiev
Chalmers, Applied Physics, Physical Electronics
Klaus Reimann
Dimitri Lederer
Jean-Pierre Raskin
Spartak Gevorgian
Chalmers, Applied Physics, Physical Electronics
IEEE MTT-S International Microwave Symposium Digest, Honolulu, Hawaii
2055 - 2058
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering