Planar double gate SOI MOS devices; Fabrication by wafer bonding over pre patterned cavities and electrical characterisation
Journal article, 2007

Author

Ulf Södervall

Chalmers, Microtechnology and Nanoscience (MC2)

Other publications Research

Solid State electronics

Vol. 51(2) 231-238

Subject Categories

Physical Sciences

More information

Created

10/6/2017

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