Vibronic nature of hafnium oxide/silicon interface states investigated by capacitance frequency spectroscopy
Journal article, 2008
semiconductor-insulator boundaries
elemental semiconductors
vibronic states
phonon-phonon interactions
electron traps
interface states
capacitance
silicon
hafnium compounds
Author
Olof Engström
Chalmers, Applied Physics, Physical Electronics
Bahman Raeissi
Chalmers, Applied Physics, Physical Electronics
Johan Piscator
Chalmers, Applied Physics, Physical Electronics
Journal of Applied Physics
0021-8979 (ISSN) 1089-7550 (eISSN)
Vol. 103 10 Art. no. 104101- 104101Subject Categories
Condensed Matter Physics
DOI
10.1063/1.2921795