Integration of diffractive, refractive and plasmonic optical structures in highly functional MEMS-based scanning and biosensing systems
Doctoral thesis, 2009

localized surface plasmon resonance

replication

vertical-cavity surface-emitting laser

protein binding

silicon micromachining

polymer micro¬lens

biosensing

MEMS

diffractive microoptics

MOEMS

reflow

Kollektorn (A423) MC2-huset, Kemivägen 9, Göteborg
Opponent: Dr. Reinoud Wolffenbuttel

Author

Karin Hedsten

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

Hot Embossed Microoptics in Silicon Micromachining using a Substrate Bonder

Proceedings of 19th MicroMechanics Europe Workshop, MME 2008,; (2008)p. 137-140

Paper in proceedings

MEMS-based VCSEL beam steering using replicated polymer diffractive lens

Sensors and Actuators, A: Physical,; Vol. 142(2008)p. 336-345

Journal article

Supporting structures for transmissive optical components in MEMS

17th MicroMechanics Europe (MME06) (Southampton, UK, Sept. 3-5, 2006),; (2006)p. 69-72

Paper in proceedings

Replication of continuous-profiled micro-optical elements for silicon integration

Applied Optics,; Vol. 45(2006)p. 83-89

Journal article

Refractive lenses in silicon micromachining by reflow of amorphous fluorocarbon polymer

Jornal of Micromechanics and Microengineering,; Vol. 16(2006)p. S88-S95

Journal article

Microreplication in a silicon processing compatible polymer material

Jornal of Micromechanics and Microengineering,; Vol. 15(2005)p. 116-121

Journal article

Subject Categories

Other Industrial Biotechnology

Other Electrical Engineering, Electronic Engineering, Information Engineering

ISBN

978-91-7385-228-9

Technical report MC2 - Department of Microtechnology and Nanoscience, Chalmers University of Technology: 133

Doktorsavhandlingar vid Chalmers tekniska högskola. Ny serie: 2909

Kollektorn (A423) MC2-huset, Kemivägen 9, Göteborg

Opponent: Dr. Reinoud Wolffenbuttel

More information

Created

10/7/2017