Quest for an optimal gadolinium silicate gate dielectric stack
Paper in proceedings, 2008

Author

I. Z. Mitrovic

Maria Werner

W.M. Davey

S. Hall

P.R. Chalker

H.D.B. Gottlob

M.C. Lemme

Olof Engström

Chalmers, Applied Physics, Physical Electronics

K. Cherkaoui

P.K. Hurley

39th IEEE Semiconductor Interface Specialists Conference (SISC 2009), December 11-13, 2008,

Subject Categories

Other Engineering and Technologies

Other Engineering and Technologies not elsewhere specified

More information

Created

10/6/2017