Compatibility Assessment of CVD growth of Carbon nanofibers on bulkCMOS devices
Journal article, 2008

Author

Farzan Alavian Ghavanini

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

Helen lepoche

Mohammad Kabir

Per Lundgren

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

Peter Enoksson

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

NANO LETTERS

Areas of Advance

Nanoscience and Nanotechnology (2010-2017)

Production

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

Infrastructure

Nanofabrication Laboratory

More information

Latest update

12/13/2018