Compatibility Assessment of CVD growth of Carbon nanofibers on bulkCMOS devices
Journal article, 2008
Author
Farzan Alavian Ghavanini
Chalmers, Applied Physics, Electronics Material and Systems
Helen lepoche
Jonas Berg
Muhammad Amin
Mohammad Kabir
Per Lundgren
Chalmers, Applied Physics, Electronics Material and Systems
Peter Enoksson
Chalmers, Applied Physics, Electronics Material and Systems
NANO LETTERS
Areas of Advance
Nanoscience and Nanotechnology
Production
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering
Infrastructure
Nanofabrication Laboratory