Design, simulations and optimization of micromachined Golay-cell based THz sensors operating at room temperature
Paper in proceedings, 2009

An innovative wideband micro-machined terahertz (THz)sensor operating at room temperature is presented. By means of 3D finite element method (FEM) simulations, the original design of M. Golay was miniaturized and modified by the introduction of a second absorbing membrane providing simultaneously an inherently integrated capacitive read-out. With a help of advanced multi-objective design tools, the sensor design was optimized in terms of linear dimensions, material’s electrical and mechanical properties. Feasibility of the final structure and its tolerance to parameters variation during the fabrication was assessed through a Monte-Carlo analysis. The optimized sensor promises a bandwidth of 3.5 THz (0.5-4THz).

Author

Vincent Desmaris

Chalmers, Department of Radio and Space Science, Advanced Receiver Development

Hawal Marouf Rashid

Chalmers, Department of Radio and Space Science, Advanced Receiver Development

Alexey Pavolotskiy

Chalmers, Department of Radio and Space Science, Advanced Receiver Development

Victor Belitsky

Chalmers, Department of Radio and Space Science, Advanced Receiver Development

Procedia Chemistry - Proceedings of the Eurosensors XXIII conference

Vol. 1 1 1175-1178

Subject Categories

Other Engineering and Technologies not elsewhere specified

Other Materials Engineering

Other Electrical Engineering, Electronic Engineering, Information Engineering

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Created

10/7/2017