Processing of RF-MEMS Switches
Paper in proceeding, 2004
Author
Ros-Marie Lundh
Yangjian Chen
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Shimul Chandra Saha
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Erik Kollberg
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Piotr Starski
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Niklas Rorsman
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Anders Derneryd
MEMSWAVE, June 30-July 2, 2004, Uppsala, Sweden
Areas of Advance
Information and Communication Technology
Nanoscience and Nanotechnology (SO 2010-2017, EI 2018-)
Infrastructure
Nanofabrication Laboratory
Subject Categories (SSIF 2011)
Other Electrical Engineering, Electronic Engineering, Information Engineering