Processing of RF-MEMS Switches
Paper in proceedings, 2004

Author

Ros-Marie Lundh

Yangjian Chen

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Shimul Chandra Saha

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Other publications Research

Erik Kollberg

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Other publications Research

Piotr Starski

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Other publications Research

Niklas Rorsman

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Other publications Research

Anders Derneryd

MEMSWAVE, June 30-July 2, 2004, Uppsala, Sweden

Areas of Advance

Information and Communication Technology

Nanoscience and Nanotechnology (2010-2017)

Infrastructure

Nanofabrication Laboratory

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/7/2017

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