A micromachined Nanoindentation force sensor
Paper in proceedings, 2004

microfabrication

force sensor

nanoindentation

Author

Alexandra Nafari

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Håkan Olin

Andrey Danilov

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Eurosensors

Vol. XVIII 62-63

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/8/2017