A micromachined nanoindentation force sensor
Journal article, 2005
transmission electron microscope
microfabrication
interchangable tip
Force sensor
Nanoindentation
Capacitive detection
Author
Alexandra Nafari
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Andrey Danilov
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics
Henrik Rödjegård
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Håkan Olin
Sensors and Actuators, A: Physical
0924-4247 (ISSN)
Vol. A123-124 23 44-49Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering