Scaling of epitaxial layers in a 70 nm gate length InGaAs-InAlAs-InP HEMT technology
Conference contribution, 2005

Author

Malin Borg

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Shu Min Wang

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Jan Grahn

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Proceed. GigaHertz 2005 Conference

155-158

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/6/2017