Silicon substrate integrated high Q-factor parallel-plate ferroelectric varactors for microwave/millimeterwave applications
Journal article, 2003

Author

Andrei Vorobiev

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Pär Rundqvist

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Spartak Gevorgian

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Khaled Khamchane

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Appl. Phys. Lett.

Vol. 83 15 3144-6

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

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Created

10/7/2017