Widely tunable high-speed bulk-micromachined short-wavelength MEMS-VCSEL
Paper in proceeding, 2010
We present the first results of a high-speed bulk-micromachined tunable vertical-cavity surface-emitting laser (VCSEL) operating near 850nm using a half-symmetric resonator with a movable curved microelectromechanical system (MEMS) membrane.
Author
Hooman A. Davani
Technische Universität Darmstadt
Christian Grasse
Technical University of Munich
Benjamin Kögel
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Petter Westbergh
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Christian Gierl
Technische Universität Darmstadt
Karolina Zogal
Technische Universität Darmstadt
Sandro Jatta
Technische Universität Darmstadt
Gerhard Böhm
Technical University of Munich
Tobias Gründl
Technical University of Munich
Peter Meissner
Technische Universität Darmstadt
Anders Larsson
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
M. C. Amann
Technical University of Munich
Semiconductor Laser Conference (ISLC), 2010 22nd IEEE International
0899-9406 (ISSN)
9-10978-1-4244-5683-3 (ISBN)
Subject Categories
Telecommunications
DOI
10.1109/ISLC.2010.5642777
ISBN
978-1-4244-5683-3