An UV linear variable optical filter-based micro-spectrometer
Paper in proceedings, 2010

This paper presents the design, fabrication and spectral measurements of an Ultra-Violet (UV) Linear Variable Optical Filter (LVOF)-based micro-spectrometer operating in the 300 nm - 400 nm wavelength range. The UV LVOF has been fabricated in an IC-Compatible process using resist reflow. Characterization by passing monochromatic light through the LVOF, shows high linearity of the profile. It is expected that using signal processing, spectral resolution better than 0.5 nm can be achieved with this UV LVOF. The filter provides the possibility to have a robust high-resolution micro-spectrometer in the UV on a CMOS chip.

Linear variable filter

On-chip

Micro-spectrometer

UV

Ultra-Violet

Author

A. Emadi

Delft University of Technology

H. Wu

Delft University of Technology

G. De Graaf

Delft University of Technology

Karin Hedsten

Chalmers, Microtechnology and Nanoscience (MC2), Nanofabrication Laboratory

Peter Enoksson

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

J. H. Correia

University of Minho

R. F. Wolffenbuttel

Delft University of Technology

Procedia Engineering, Proc. Eurosensors XXIV, September 5-8, 2010, Linz, Austria

1877-7058 (eISSN)

Vol. 5 416-419

Areas of Advance

Transport

Production

Subject Categories

Physical Sciences

Electrical Engineering, Electronic Engineering, Information Engineering

DOI

10.1016/j.proeng.2010.09.135

More information

Latest update

5/14/2018