Microshutters for MEMS-based time-of-flight measurements in space
Paper in proceedings, 2011

This paper reports on the fabrication, integration and first operation of a mechanical microshutter in a time-of-flight (TOF) based ion detector in space. The microshutter is fabricated from a silicon on insulator (SOI) wafer and operated in a resonance mode, 306 kHz. Open time of the shutter is 100 ns. The microshutters are integrated in the PRIMA instrument, which is part of the payload on the Swedish PRISMA mission. PRISMA was successfully launched into low Earth orbit on June 15, 2010.

Author

K. Brinkfeldt

Swerea IVF AB

Peter Enoksson

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

M. Wieser

The Swedish Institute of Space Physics

S. Barabash

The Swedish Institute of Space Physics

M. Emanuelsson

The Swedish Institute of Space Physics

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

1084-6999 (ISSN)

597-600

Areas of Advance

Transport

Production

Subject Categories

Physical Sciences

Electrical Engineering, Electronic Engineering, Information Engineering

DOI

10.1109/MEMSYS.2011.5734495

ISBN

978-142449632-7

More information

Latest update

2/28/2018