Microshutters for MEMS-based time-of-flight measurements in space
Paper i proceeding, 2011

This paper reports on the fabrication, integration and first operation of a mechanical microshutter in a time-of-flight (TOF) based ion detector in space. The microshutter is fabricated from a silicon on insulator (SOI) wafer and operated in a resonance mode, 306 kHz. Open time of the shutter is 100 ns. The microshutters are integrated in the PRIMA instrument, which is part of the payload on the Swedish PRISMA mission. PRISMA was successfully launched into low Earth orbit on June 15, 2010.

Författare

K. Brinkfeldt

Swerea

Peter Enoksson

Chalmers, Teknisk fysik, Elektronikmaterial

M. Wieser

Institutet for rymdfysik

S. Barabash

Institutet for rymdfysik

M. Emanuelsson

Institutet for rymdfysik

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

1084-6999 (ISSN)

597-600
978-142449632-7 (ISBN)

Styrkeområden

Transport

Produktion

Ämneskategorier

Fysik

Elektroteknik och elektronik

DOI

10.1109/MEMSYS.2011.5734495

ISBN

978-142449632-7

Mer information

Senast uppdaterat

2018-02-28