Miniaturized pressure sensor using a free hanging strain-gauge with leverage effect for increased sensitivity
Paper in proceedings, 2001


P. Melvås

Edvard Kälvesten

Peter Enoksson

Department of Microelectronics

Göran Stemme

The 11th International Conference on Solid-State Sensors and Actuators (TRANSDUCERS'01 / Eurosensors XV), Munich, Germany

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Life Science Engineering (2010-2018)

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