Formation of silicon structures by plasma-activated wafer bonding
Journal article, 2000
Author
Petra Amirfeiz
Department of Microelectronics, Solid State Electronics
Stefan Bengtsson
Department of Microelectronics, Solid State Electronics
Mats Bergh
Ezio Zanghellini
Chalmers, Department of Experimental Physics
Lars Börjesson
Chalmers, Applied Physics
Journal Of The Electrochemical Society
Vol. 147 7 2693-2698
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1149/1.1393591