Room temperature wafer bonding of silicon, oxidized silicon, and crystalline quartz

Stefan Bengtsson; Petra Amirfeiz

doi:10.1007/s11664-000-0180-7

Room temperature wafer bonding of silicon, oxidized silicon, and crystalline quartz
Journal article, 2000

Author

Stefan Bengtsson

Department of Microelectronics

Other publications Research

Petra Amirfeiz

Department of Microelectronics

Journal Of Electronic Materials

Vol. 29 7 909-915

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

DOI

10.1007/s11664-000-0180-7

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Created

10/8/2017

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Room temperature wafer bonding of silicon, oxidized silicon, and crystalline quartz Journal article, 2000