Reliability evaluation of manufacturing processes for bipolar and MOS devices on silicon-on-diamond materials

Bengt Edholm; Anders Soderbarg; Stefan Bengtsson

Reliability evaluation of manufacturing processes for bipolar and MOS devices on silicon-on-diamond materials
Journal article, 1996

Author

Bengt Edholm

Anders Soderbarg

Stefan Bengtsson

Department of Solid State Electronics

Other publications Research

Journal Of The Electrochemical Society

Vol. 143 4 1326-1334

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

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Created

10/8/2017

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Reliability evaluation of manufacturing processes for bipolar and MOS devices on silicon-on-diamond materials Journal article, 1996