Influence of SC-1/SC-2 cleaning on wafer-bonded silicon dioxide structures
Journal article, 1996

Author

Per Ericsson

Department of Solid State Electronics

Stefan Bengtsson

Department of Solid State Electronics

Other publications Research

Journal Of The Electrochemical Society

Vol. 143 11 3722-3727

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

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Created

10/8/2017

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