Depleted semi-insulating silicon/silicon material formed by wafer bonding
Journal article, 2000

Author

Mikael Johansson

Department of Microelectronics

Stefan Bengtsson

Department of Microelectronics

Other publications Research

Journal Of Applied Physics

Vol. 88 2 1118-1123

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/7/2017

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