Electrical characterization of low thermal budget gate oxides on Si/Si0.8Ge0.2/Si substrates
Journal article, 2002
Author
Alok Sareen
Department of Microelectronics
A. C. Lindgren
Per Lundgren
Department of Microelectronics
Stefan Bengtsson
Department of Microelectronics
Solid-State Electronics
Vol. 46 7 991-995
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1016/S0038-1101(02)00032-1