Formation of silicon structures by plasma activated wafer bonding
Paper in proceeding, 2001
Author
Petra Amirfeiz
Department of Microelectronics
Stefan Bengtsson
Department of Microelectronics
Mats Bergh
Department of Microelectronics
Ezio Zanghellini
Department of Physics
Lars Börjesson
Chalmers, Applied Physics
Semiconductor Wafer Bonding: Science, Technology, And Applications V, Proceedings
Vol. 99 29-39
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering