Diamond based silicon-on-insulator materials and devices
Paper in proceeding, 2000
Author
Stefan Bengtsson
Department of Microelectronics
Mats Bergh
Department of Microelectronics and Nanoscience
Perspectives, Science And Technologies For Novel Silicon On Insulator Devices
Vol. 73 97-107
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1016/j.diamond.2005.09.012