Depleted semi-insulating silicon/silicon material formed by wafer bonding
Paper in proceedings, 2001

Author

Mikael Johansson

Department of Microelectronics

Stefan Bengtsson

Department of Microelectronics

Semiconductor Wafer Bonding: Science, Technology, And Applications V, Proceedings

Vol. 99 420-428

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/7/2017