Depleted semi-insulating silicon/silicon material formed by wafer bonding

Mikael Johansson; Stefan Bengtsson

Depleted semi-insulating silicon/silicon material formed by wafer bonding
Paper in proceeding, 2001

Author

Mikael Johansson

Department of Microelectronics

Stefan Bengtsson

Department of Microelectronics

Other publications Research

Semiconductor Wafer Bonding: Science, Technology, And Applications V, Proceedings

Vol. 99 420-428

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/7/2017

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Depleted semi-insulating silicon/silicon material formed by wafer bonding Paper in proceeding, 2001