Spontaneity of hydrophobic Si-Si bonding and properties of the bonded interfaces

Karin Ljungberg; Anders Söderbärg; Stefan Bengtsson; Anders Jauhiainen

Spontaneity of hydrophobic Si-Si bonding and properties of the bonded interfaces
Journal article, 1993

Author

Karin Ljungberg

Anders Söderbärg

Stefan Bengtsson

Department of Solid State Electronics

Other publications Research

Anders Jauhiainen

Department of Solid State Electronics

Proc of the 2nd International Symposium on Semiconductor Wafer Bonding. The Electrochemical Society

Vol. 93 29 473-

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

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Created

10/7/2017

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Spontaneity of hydrophobic Si-Si bonding and properties of the bonded interfaces Journal article, 1993