Formation of directly bonded Si/Si interfaces in ultra-high vacuum
Paper in proceedings, 1997

Author

Karin Ljungberg

Francois Grey

Stefan Bengtsson

Department of Solid State Electronics

Proc 2nd International Symposium on Control of Semiconductor Interfaces. North-Holland.

813-

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/7/2017