Sensitivity Analysis of TRL Calibration in Waveguide Integrated Membrane Circuits
Journal article, 2013

We present a sensitivity analysis on TRL calibrated S-parameter measurements of membrane circuits in the WR-03 waveguide band (220-325 GHz). The impact of waveguide and membrane circuit misalignment, as well as waveguide dimension mismatch is investigated. The analysis is performed for the thru-reflect-line (TRL) calibration applied to E-plane split waveguide blocks carrying membrane circuits. The analysis shows a large influence of the waveguide width tolerance on transmission and reflection phase after the TRL calibration. For a 20 mm long rectangular waveguide with a ± 5 μm width tolerance a phase uncertainty as large as ± 45° for reflection and ± 30° for transmission measurements is observed.

measurements

submillimeter wave

scattering parameters

monolithic integrated circuits (MICs)

TRL

membrane

vector network analyzer (VNA)

sensitivity analysis

Calibration

terahertz (THz)

Author

Jörgen Stenarson

Thi Ngoc Do Thanh

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Huan Zhao Ternehäll

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

GigaHertz Centre

Aik-Yean Tang

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

GigaHertz Centre

Klas Yhland

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

GigaHertz Centre

Jan Stake

GigaHertz Centre

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

IEEE Transactions on Terahertz Science and Technology

2156-342X (ISSN)

Vol. 3 5 558-565 6585798

Areas of Advance

Information and Communication Technology

Infrastructure

Nanofabrication Laboratory

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

DOI

10.1109/TTHZ.2013.2274371

More information

Created

10/7/2017