RF-MEMS and MOEMS
New and emerging technologies and materials
Chalmers, Applied Physics, Electronics Material and Systems Laboratory
Chalmers, Signals and Systems, Kommunikationssystem, informationsteori och antenner, Antennas
Royal Institute of Technology (KTH)
Chalmers, Applied Physics, Electronics Material and Systems Laboratory
1759-0787 (ISSN)
Vol. 6 5 459-465Information and Communication Technology
Production
Electrical Engineering, Electronic Engineering, Information Engineering
Nanofabrication Laboratory
10.1017/s1759078714000609