µFab: The Swedish Micro- and Nanofabrication Network
Conference contribution, 2006
Sweden holds a very strong position in microstructure technology (MST). During the last decades universities, research institutes and commercial enterprises have all contributed to cover the entire field from academic research to industrial production. A key factor in this development has been, and still is, the availability of state-of-the-art process facilities, with the three large cleanrooms at Chalmers, KTH and Uppsala University at the top-of-the-line. These laboratories have now entered into a collaborative network, µFab or the Swedish Micro- and Nanofabrication Network, an open user facility and an excellent resource for education, research and industrial development. More than 50 % of the technical presentations at this workshop (MSW 2006) is based on laboratory work within the µFab network.
Ångström Microstructure Laboratory