Fabrication and characterization of reactively sputtered TaN thin film resistors for millimeter wave applications
Journal article, 2004

electrical resistivity

tantalum compounds

S-parameters

microstrip lines

MIMIC

thin film resistors

sputter deposition

Author

Anders Mellberg

Chalmers, Microtechnology and Nanoscience (MC2)

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Samuel P. Nicols

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Chalmers, Microtechnology and Nanoscience (MC2)

Niklas Rorsman

Chalmers, Microtechnology and Nanoscience (MC2)

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Herbert Zirath

Chalmers, Microtechnology and Nanoscience (MC2)

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Electrochemical and Solid State Letters

Vol. 7 11 G261-3

Subject Categories

Materials Engineering

Electrical Engineering, Electronic Engineering, Information Engineering