Design, fabrication and S-parameter characterization of a planar Goubau line from 0.75 THz to 1.1 THz for near-field on-wafer biosensing

Paper in proceeding, 2017

We present the design, fabrication and characterization of a Planar Goubau Line (PGL) from 0.75 THz to 1.1 THz intended for on-wafer near-field characterization of biological samples. A design method of the transition between the Coplanar Waveguide (CPW) and the PGL was developed for minimising reflections.

In order to minimize losses and the propagation of substrate modes, the structures were fabricated on a 30 μm benzocyclobutene (BCB) substrate on top of a high resistive silicon that acts as mechanical support.

The structures were characterized with on-wafer S-parameter measurements from 0.75 to 1.1 THz using Vector Network Analyser.