Design, fabrication and S-parameter characterization of a planar Goubau line from 0.75 THz to 1.1 THz for near-field on-wafer biosensing
Paper in proceedings, 2017

We present the design, fabrication and characterization of a Planar Goubau Line (PGL) from 0.75 THz to 1.1 THz intended for on-wafer near-field characterization of biological samples. A design method of the transition between the Coplanar Waveguide (CPW) and the PGL was developed for minimising reflections.

In order to minimize losses and the propagation of substrate modes, the structures were fabricated on a 30 μm benzocyclobutene (BCB) substrate on top of a high resistive silicon that acts as mechanical support.

The structures were characterized with on-wafer S-parameter measurements from 0.75 to 1.1 THz using Vector Network Analyser.

biosensing

on-wafer measurements

VNA

Planar Goubau line

THz

Author

Juan Cabello Sanchez

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Helena Rodilla

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Vladimir Drakinskiy

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Jan Stake

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

8th International THz-Bio Workshop

8th International THz-Bio Workshop
Rome, Italy,

Areas of Advance

Information and Communication Technology

Life Science Engineering (2010-2018)

Infrastructure

Kollberg Laboratory

Nanofabrication Laboratory

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

More information

Latest update

11/1/2018