A low-pressure encapsulated DRIE resonant pressure sensor electrically excited and detected using `burst’ technology
Journal article, 2000
Author
Jessica Melin
Peter Enoksson
Department of Microelectronics
Thierry Corman
Göran Stemme
Journal of Micromechanics and Microengineering
10 209-217
Subject Categories
Mechanical Engineering
Other Engineering and Technologies
Electrical Engineering, Electronic Engineering, Information Engineering