Interdiffusion in as-deposited Ni/Ti multilayer thin films analyzed by atom probe tomography
Journal article, 2019

The nanoscale design of metallic multilayer thin films is one crucial factor that greatly influences the kinetics, often inducing unusual phase transformations. Metastable or amorphous phases may directly form in as-deposited films of certain thicknesses, which is common for Ni/Ti multilayers. Atom probe tomography and X-ray diffraction analyses are performed here to study the interdiffusion and structural changes as a function of the bilayer thickness in Ni/Ti multilayers. The films are deposited by DC magnetron sputtering with near 50:50 compositions. Multilayers with 5 nm bilayer thickness are found to be highly intermixed, with compositions up to ∼25 at.% for both diffuser metals, inducing amorphization reactions during deposition.

Thin films


Amorphous materials

Atom probe


Hisham Aboulfadl

Universität des Saarlandes

Chalmers, Physics, Microstructure Physics

Fabian Seifried

Karlsruhe Institute of Technology (KIT)

Michael Stüber

Karlsruhe Institute of Technology (KIT)

Frank Mücklich

Universität des Saarlandes

Materials Letters

0167-577X (ISSN)

Vol. 236 92-95

Subject Categories

Inorganic Chemistry

Materials Chemistry

Condensed Matter Physics



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