Toward Industrial Exploitation of THz Frequencies: Integration of SiGe MMICs in Silicon-Micromachined Waveguide Systems
Journal article, 2019
Author
[Person 02734aa1-b077-4dfa-b4a2-f24f5d794711 not found]
[Person 41cf5c2d-2858-40b9-a5e1-2214472fc965 not found]
[Person 9c4843bf-4bfc-4ce9-bb28-460c16e758fd not found]
[Person 27e5f642-c72d-4267-852f-30e1d7f97d2d not found]
[Person 48c6c8ff-971d-4e79-a9b9-300ffd7b8742 not found]
[Person e2da19b4-3fe8-45c1-bcff-d7674fc67699 not found]
[Person 7089aaa6-8ad8-4de9-84a2-fa1544bf33f4 not found]
[Person dcaef7ed-0416-4718-9993-1f574cd667b5 not found]
[Person 21b6842f-0249-4385-a7e7-ac612539d74c not found]
[Person 71956d9b-c694-41be-b646-25af1a6bb02d not found]
[Person ee6c1c7c-4a22-494d-b363-457c26b1680f not found]
[Person 4aac383c-cc65-4bed-b419-3dad36d49dcc not found]
IEEE Transactions on Terahertz Science and Technology
2156-342X (ISSN)
Vol. 9 6 624-636Micromachined terahertz systems -a new heterogeneous integration platform enabling the commercialization of the THz frequency spectrum (M3TERA)
European Commission (EC), 2015-02-01 -- 2017-12-31.
Subject Categories
Other Engineering and Technologies not elsewhere specified
Other Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1109/TTHZ.2019.2943572