Interface Layers of Niobium Nitride Thin Films
Paper in proceeding, 2019
Intermediate layers formed by thin NbN films are studied. A surface phase of NbN different from the bulk one under the oxide layer and a layer consisting of NbNx-SiOy between the film and the substrate are found.
Author
A. Lubenschenko
National Research University Moscow Power Engineering Institute
V. A. Iachuk
National Research University Moscow Power Engineering Institute
Sascha Krause
Chalmers, Space, Earth and Environment, Onsala Space Observatory
Alexey Pavolotskiy
Chalmers, Space, Earth and Environment, Onsala Space Observatory
D. A. Ivanov
National Research University Moscow Power Engineering Institute
Olga Lubenchenko
National Research University Moscow Power Engineering Institute
O. N. Pavlov
National Research University Moscow Power Engineering Institute
Journal of Physics: Conference Series
17426588 (ISSN) 17426596 (eISSN)
Vol. 1410 1 012124
6th International School and Conference on Optoelectronics, Photonics, Engineering and Nanostructures, SPbOPEN 2019
Saint Petersburg, Russia,
Saint Petersburg, Russia,
Subject Categories
Inorganic Chemistry
Materials Chemistry
Condensed Matter Physics
Infrastructure
Onsala Space Observatory
DOI
10.1088/1742-6596/1410/1/012124