High-Q Dispersion-Engineered Si3N4 Microresonators Based on a Subtractive Processing Technique
Paper in proceeding, 2020

We demonstrate dispersion-engineered Si3N4 microresonators with mean Q values >10 million fabricated using standard subtractive techniques. Soliton microcombs at 100 GHz line spacing and mode-locked dark-pulse Kerr combs are reported.


Zhichao Ye

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Krishna Sundar Twayana

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Peter Andrekson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Victor Torres Company

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Optics InfoBase Conference Papers

21622701 (eISSN)

9781943580767 (ISBN)

2020 Conference on Lasers and Electro-Optics
San Jose, USA,

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Subject Categories

Accelerator Physics and Instrumentation

Aerospace Engineering

Atom and Molecular Physics and Optics



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