Ultrahigh-quality-factor micro- and nanomechanical resonators using dissipation dilution
Review article, 2024
Author
Nils Johan Engelsen
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Technology
Alberto Beccari
Swiss Federal Institute of Technology in Lausanne (EPFL)
Tobias J. Kippenberg
Swiss Federal Institute of Technology in Lausanne (EPFL)
Nature Nanotechnology
1748-3387 (ISSN) 1748-3395 (eISSN)
Vol. 19 6 725-737Subject Categories
Condensed Matter Physics
DOI
10.1038/s41565-023-01597-8
PubMed
38443697