Interface defects in HfO2, LaSiOx and Gd2O3 high-k/metal gate structures on silicon: Energy distribution and passivation
Paper in proceeding, 2007
Author
P.K. Hurley
K. Cherkaoui
E O'Connor
A.W. Groenland
M.C. Lemme
H.D.B. Gottlob
M Schmidt
S. Hall
Y. Lu
O. Buiu
Bahman Raeissi
Chalmers, Microtechnology and Nanoscience (MC2)
Johan Piscator
Chalmers, Microtechnology and Nanoscience (MC2)
Olof Engström
Chalmers, Microtechnology and Nanoscience (MC2)
Proc. Electrochemical Society Meeting, Washington DC, October 2007
Subject Categories
Other Engineering and Technologies